发明名称 MANUFACTURE OF COOLING TYPE PHOTOELECTRIC CONVERSION DEVICE
摘要 PURPOSE:To form a wiring pattern on the outer circumferential surface of the inner cylinder in a high degree of accuracy by a method wherein a metal conductive film is coated all over the outer circumferential surface of the inner cylinder having a resist film whereon a patterning has been performed, and said resist film is removed together with the metal conductive film. CONSTITUTION:After a resist film 4 has been applied on the outer circumferential surface of the outer cylinder and a light-shielding film 5 has been applied on the inner circumferential surface, a pattern forming mask 6 is wound around a mask tight-holding fixture 7, exposure and developing processes are conducted, and a patterning is performed. Then, after a metal conductive film 8 has been formed on the whole surface of the outer circumferece of the inner cylinder 1, a number of electrode lead wiring patterns 9 are formed by removing the films 4 and 5.
申请公布号 JPS5939065(A) 申请公布日期 1984.03.03
申请号 JP19820149475 申请日期 1982.08.27
申请人 FUJITSU KK 发明人 HAMASHIMA SHIGEKI;IMAI SOUICHI
分类号 H01L27/14;H01L31/02;H01L31/18 主分类号 H01L27/14
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