| 摘要 |
PURPOSE:To perform pattern exposure without contacting the original, by enclosing a resist on the surface of a round rod with a conical face mirror. CONSTITUTION:A negative on which a pattern is formed is irradiated by a light source 1 and a condenser lens 2. Transmitted light passes through a projection lens 4 and reflected by a conical face mirror 5, and the pattern is printed on the surface of a round metallic rod coated with the resist. The conical face mirror 5 is constituted by a highly reflective multilayer film mirror. The central part of it is cut off and the round metallic rod 6 is inserted into it. The angle theta is so determined that the virtual image face 8 of transmitted light 9 formed by the conical face mirror 5 becomes a plane. The round rod is columnar and can be exposed at a time and no seam appears between patterns. |
