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发明名称
摘要
申请公布号
JPS59500340(A)
申请公布日期
1984.03.01
申请号
JP19830500904
申请日期
1983.01.31
申请人
发明人
分类号
H01L23/48;A61M5/148;B04B5/04;G01N15/04;G01N15/05;H01L23/50
主分类号
H01L23/48
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