| 摘要 |
PURPOSE:To correct the amount of cut automatically without removing a diaphragm being machined by making comparative operation of the measured value of thickness with the preset reference thickness, finding the error, and correcting the amount of cut based on this error. CONSTITUTION:In a machining equipment for forming diaphragms for pressure sensors, electrical signals SR that indicate the thickness (t) converted into digital values, are outputted from a thickness arithmetic circuit 61 to an arithmetic and control unit 72. The signals SR are outputted, through an I/O interface 71, to a CPU 67, in which the thickness (t) indicated by the signals SR is subjected to comparative operation with the reference thickness (to) prestored in a memory 69. If the machining is not carried out according to the preset value, the error is calculated and, based on this, the amount of feed in Z axis (amount of feeding cut) is corrected so that the thickness of the diaphragm becomes a desired value, which then, is stored in the memory 69. |
