| 摘要 |
PURPOSE:To improve the quality of process control by correcting a factor or a bias so that the difference between an operation signal and a static characteristic compensating part operated by a feedforward model or a controlled output signal is about zero or included in a prescribed range. CONSTITUTION:A static characteristic compensating signal Dn being an output of the feedforward model 38, is added to a controlled output signal 32a by an adding part 33 to obtain a signal A. In addition, the signal Dn is added to the signal A by an adding part 35 through an imperfect differentiation part 42. On the other hand, an operation part finds the difference between the signal A from the adding part 33 and the signal Dn and an integration part 44 integrates the difference to apply the integrated value 44a to a multiplying part 40. The factor of the multiplying part 40 is adjusted so that the integrated value becomes zero. Thus, the feedforward model 38 is corrected so that the time-integrated value or average value of the difference between the signal A from the adder 33 and the static characteristic compensating part Dn after correction becomes zero. |
