| 摘要 |
PURPOSE:To facilitate application of micro up-down motion onto a table, by providing a plurality of gas feed ports in the table slidable through a gas bearing and controlling the gas pressure to each feed port. CONSTITUTION:The table for a dicing device is constructed with an upper face table 54 and sliding bases 52, 53 and slided smoothly along the guide face on a fixed table 1 by means of a gas bearing. A plurality of gas bearings are provided and a plurality of gas feed ports are provided correspondingly. The pressure of gas to be fed to the upper and lower face feed ports 57, 55 is controlled to move the table up and down by micro distance through the pressure difference. Consequently micro motion such as cutting feed is facilitated. |
