| 摘要 |
PURPOSE:To prevent the deposit of foreign matters inside onto a total reflection mirror and an output mirror by making a dielectric absorb them by driving a laser generator and thus prevent the damage due to local overheating. CONSTITUTION:When the laser generator is driven, sealed gas is put in forced circulation in the state that the main open-close valve (19a, 19b) is closed and the sub open-close valve 20 (20a, 20b) is opened, and power supply is given to the electrode, resulting in the excitation of the sealed gas. At the time when the sealed gas becoming at a high temperature passes through a dust collector filled with the dielectric ball, the dielectric ball is charged with static electricity by friction. Thereby, the foreign matters circulating with the sealed gas are effectively absorbed to the dielectric ball, and accordingly the inside of the laser device is cleaned. By opening the main open-close valve 19 and closing the sub open-close valve 20 after operation for a fixed time in that state and then collect dust, while dust collection is performed also in all time operation by means of the dust collector 18b which performs normal operation. |
