| 摘要 |
PURPOSE:To detect a small load precisely with a high sensitivity by arranging a stopper wall formed in a casing separately facing both end faces of a piston body in the moving direction thereof and a sensor for detecting the displacement of a diaphragm or the piston body. CONSTITUTION:A casing 10 is, for example, made of metal and a pair of split casing pieces 10a and 10b are connected with a bolt 11. A piston having chamber 12 is formed airtight on the opposed surfaces of the casing pieces 10a and 10b and a diaphragm 13 is spread across the housing chamber. The diaphragm 13 is made of an elastic material such as rubber and steel plate and is stopped at the neutral position subjected to no external force as it divides the piston housing chamber 12 into two air chambers 14 and 15. An air supply hole 16 is formed on the air chamber 14 to feed a compressed air thereinto at a desired air pressure. |
