| 摘要 |
PURPOSE:To enable the measurement with a high accuracy by detecting changes in the pressure of a gas surrounding a contour piezo-electric vibrator depending on variation in the equivalent series resistance of a vibrator. CONSTITUTION:A tuning fork piezo-electric vibrator 1 is fixed on a sealed tube 2 with the bottom thereof and a lead 3 sticks out from the sealed tube 2 through a cover glass 4. The wall of the sealed tube 2 is provided with gas passage holes 5, 5... while a heating wire 6 is printed thereon with a lead 7 drawn out through the covar glass 4. The tube 2 with the piezo-electric vibrator 1 thus fixed is anchored at a corner in a case 8 and a rubber elastic balloon-like bellows 10 is provided in a hole 9 arranged properly on the wall surface of the case 8 to communiate a gas to be measured in the pressure with the bellows 10. A fluid to be measured is introduced into the bellows 10 so as to be equal to the internal pressure of a pressure sensor case 8 and then, the series equivalent resistance of the vibrator 1 is measured with a meter thereby enabling the reading of the pressure P. |
