| 摘要 |
PURPOSE:To improve the response by providing a transmission liquid for transmitting pressure of an external liquid to a pressure sensitive element and a communication tube for holding the transmission liquid while having an orifice on the side of the transmission liquid near the interface between the external liquid and the transmission liquid. CONSTITUTION:This pressure sensor 20D has a pressure sensitive element 30 such as diffusion type semiconductor pressure sensitive element arranged in a box 37, a communication tube 36 having an orifice 34 and a transmission liquid 31 never dissolving gas, for example, silicon oil so arranged to hold from the surface of the pressure sensitive element in the communication tube 36 to the orifice 34 while transmitting the pressure of the external liquid 33 to the pressure sensitive element 30. The inner diameter of the orifice 34 and the axial length are determined so that the transmission liquid 31 in the communicating tube 36 won't flow out of the orifice 34 due to a surface tension of the transmission liquid 31. |
