| 摘要 |
PURPOSE:To improve the detection sensitivity, by constituting a pressure sensor with a pressure receiving diaphragm, which has a pressure receiving part surrounded with plural space parts and has coil patterns on both faces of the pressure receiving part, and a magnetic field generating means which gives a magnetic field interlinked to these coil patterns. CONSTITUTION:The pressure sensor is constituted with a case 20 in which a hollow disc-shaped spacer 14, a permanent magnet 15, a pressure receiving diaphragm 16, a holder 17, a cover 28, a packing 19, and incidence windows 21 and 22 are provided and a measuring component gas is sealed. The pressure receiving diaphragm 16 has a pressure receiving part 30 which is surrounded with plural space parts 24, 25, and 26 formed by cutting a thin plate such as a quartz plate and is supported by narrow arms 27, 28, and 29, and coil patterns 31 provided on both faces of the pressure receiving part 30. When the pressure in the case 20 is increased by the incidence of infrared rays, the pressure receiving diaphragm is pressed upward, and a magnetic flux is interlinked with coil patterns 31 to flow an induction current. |
