发明名称 HERMETICALLY SEALING DEVICE
摘要 PURPOSE:To enhance the reliability of products and to contrive the improvement of working efficiency by a method wherein a hermetically sealing device is constituted into such a structure that, with gas substituting chambers for article carrying-in and article carrying-out attached to an airtight working chamber, the carrying-in of articles into the airtight working chamber, the treatment and the carrying-out can be all executed without depending on hand work. CONSTITUTION:Inner doors 19 are shut and thereafter, articles 7 to be worked are fed out in order from a multi-stage magazine 61 on a feeding-terminal 32 one set by one set on a feeding-out slider 41 by a feeding-out pusher 34. The fed-out articles 7 to be worked are fed to a work line 28 and when a continuous airtight sealing work is completed, the articles 7 are fed to a recovery slider 42 and are further housed in a multi-stage magazine 62 for recovery by a recovery pusher 37. The above operations are repeated and at a point all the treated articles are housed in the multi-stage magazine 62 on a recovery terminal 35, the inner doors 19 are opened, the articles are transferred in a gas substituting chamber 18 B1 by a magazine transferring unit 36, the inner doors 19 are again shut and thereafter, outer doors 20 are opened and the articles are drawn out outside.
申请公布号 JPS62156840(A) 申请公布日期 1987.07.11
申请号 JP19850297432 申请日期 1985.12.28
申请人 TOSHIBA CORP 发明人 OGAWA AKIRA
分类号 H01L23/02 主分类号 H01L23/02
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