| 摘要 |
PURPOSE:To automate and reduce the number of steps of a production line by inverting the front the back side of an improper wafer in an inspecting device, thereby facilitating the management of the flow of the wafers. CONSTITUTION:Wafers are supplied through a passage 4 from a carrier 1 to an inspecting unit 4, which inspects the wafers, the improper wafer 16 is inverted from the front to back surface sides via elements 11-13 by an inverter 8, and the inverted wafer 14 is fed to a passage 14. In the next inspecting section, the inverted wafer 15 is omitted for the inspection, and wasted in the final section. According to the structure, the inspecting steps can be continuously flowed irrespective of the propriety of the wafer. Accordingly, the management of the flow of the wafers can be facilitated, thereby automating and reducing the number of steps of a production line. |
