发明名称 |
Electrode structure for a zinc oxide thin film |
摘要 |
An electrode structure for a zinc oxide thin film having a SnO2 layer between the surface of the zinc oxide thin film and the electrode. A tuning fork vibrator equipped with such a structure has a high reliability in that changes in resonance frequency and insulation resistance (IR) with time are small and the increase in series resonance resistance (RO) is small.
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申请公布号 |
US4433264(A) |
申请公布日期 |
1984.02.21 |
申请号 |
US19830500828 |
申请日期 |
1983.06.03 |
申请人 |
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发明人 |
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分类号 |
H03H9/17;H01L41/22;H03H9/125;H03H9/13;H03H9/21;(IPC1-7):H01L41/08 |
主分类号 |
H03H9/17 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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