| 摘要 |
PURPOSE:To prevent the damage of a dielectric element due to thermal expansion of a dielectric electrode by covering the surface except a main discharge unit of the element which covers the metal electrode for forming the dielectric electrode, with an insulator having a flexibility. CONSTITUTION:The surface except a main discharge unit 5 of a dielectric element opposed to a ground metal electrode 2 with a dielectric electrode 3' is covered with an Si rubber insulator layer 13 which has a flexibility. Thus, even if the electrode 3' is thermally expanded due to the discharge energy, the layer 13 absorbs the variation in the expansion of the dielectric element due to its flexibility, thereby resulting in no damage of the element. Further, the layer 13 can increase its thickness, the creeping discharge except the main discharge unit 5 of the electrode 3' can be prevented, and a discharge energy is effectively applied to a laser medium. Even if the layer 13 is exposed with slight creeping discharge, the production of organic outgas can be extremely reduced. |
