PRODUCTION OF IRIDIUM OXIDE FILM BY THERMAL OXIDATION

摘要

PURPOSE:To obtain an Ir oxide film having homogeneity over a large area and showing electrochromism by forming a composite Ir-C film on a substrate and oxidizing the film under heating in the air. CONSTITUTION:A composite Ir-C film is formed by an electron-beam binary vapor deposition method by which Ir and C are evaporated from separate evaporating sources to form a composite film on the same substrate or by other method. The composite Ir-C film is oxidized under heating in the air to obtain an Ir oxide film.