| 摘要 |
PURPOSE:To form a device which can control light with an electrical signal of a high frequency and a broad band, by providing a thin elastic piezoelectric film having the velocity of sound smaller than the velocity of sound of an elastic material substrate provided with an optical guide part on said substrate and forming a comb-type electrode pair on the thin film. CONSTITUTION:A metallic film band 50 is formed on the surface of an elastic material substrate (e.g.; a sapphire substrate, sound velocity: approx. 6km/sec) 1 and while the substrate 1 is heated to about 500-800 deg.C, a thin ZnO film (sound velocity; approx. 2.6km/sec) is epitaxially grown thereon by a sputtering vapor-deposition method, thereby forming an elastic piezoelectric film 21 (in this stage of a ZnO polycrystalline film is formed on said band 50 and this part serves as an optical guide). A pair of comb-type electrodes 22, 22 consisting of conductors are formed on the film 21, whereby the control device for light is formed. |
