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发明名称
摘要
申请公布号
JPS5926242(U)
申请公布日期
1984.02.18
申请号
JP19820120629U
申请日期
1982.08.10
申请人
发明人
分类号
H01L21/306;(IPC1-7):H01L21/306
主分类号
H01L21/306
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代理人
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地址
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