Reduced capacitance electrode assembly.

摘要

A reduced capacitance electrode assembly (34) for use in an alternating current plasma system provides reduced input capacitance to an associated tuning network. The assembly (34) includes an electrode (56) adapted to receive alternating current power for maintaing a plasma region and a plurality of electrically conductive plates (58). The plates (58) are closely spaced apart by less than a predetermined distance on one side of the electrode (56) for precluding the formation of a plasma region on the one side of the electrode (56) and for providing a plurality of series capacitances to present a substantially reduced capacitance to the alternating current.

The reduced capacitance electrode assembly (34) is particularly useful in a system for making photovoltaic devices wherein a plurality of amorphous semiconductor materials are deposited onto a continuous conductive substrate (11) moving through a corresponding plurality of deposition chambers. At least one of the chambers includes a reduced capacitance electrode assembly (34) as above with the conductive plates (58) being on the side of the electrode (56) opposite the substrate (11) and the electrode (56) establishing a plasma between it and the substrate (11).