Moisture sensor and a process for the production thereof.

摘要

A novel moisture sensor which comprises a moisture senstive film formed either between a pair of electrodes or on any of the electrode which are formed on a solid substrate for a moisture sensor, said moisture sensitive film is made of a plasma polymerized polymer thin film having hydrophilic groups incorporated into its surface layer, which shows an excellent resistance to water and chemicals and a good moisture responsibility, and a process for the production thereof; and a moisture measuring cell which has the aforesaid moisture sensor and is equipped with a sample inlet part and an outlet part.