| 摘要 |
PURPOSE:To obtain a differential pressure transmitter having high temp. property and high pressure resistant property and easy in processing and assembling, by a metod wherein a diaphragm and a main body are constituted by ceramics and electrodes comprising conductive layes are formed to the surface of the diaphragm and the surface of the main body opposed thereto. CONSTITUTION:A circular diaphragm 11 thick in the outer peripheral part thereof and thin in the other part and a main body 3 are formed of ceramics such as SiC, Al2O3 or the like. Pressures P1, P2 guided to a flange 7 act on a seal diaphragm 34 and silicone oil 6 is moved into a communication orifice 33 to bend the diaphragm 11. The electrostatic capacity between electrodes 11, 31 on the surfaces of the diaphragm 11 and the main body 3 comprising conductive layers is changed corresponding to the displacement of the diaphragm 11 and the detection signal thereof is taken out through an outtake wire 36. By this method, a differential pressure having high temp. property and high pressure resistant property and easy in processing and assembling is obtained. |
