| 摘要 |
PURPOSE:To enable inexpensive and continuous mass production of amorphous photoconductive layers with a simple constitution and good reproducibility, by placing plural pieces of conductive drums opposite to each other in a reaction chamber, and generating glow discharge by a high frequency electric power source between the conductive drums. CONSTITUTION:A formed gas is fed into introducing pipes 14 in the stage of forming, for example, amorphous Si photoconductive layers on the circumferential surfaces of respective conductive drums 12. The inside of a reaction chamber 10 is beforehand evacuated to a vacuum state and the drums 12 are beforehand heated to about 100-400 deg.C prior to said feeding. High frequency electric power is applied from a high frequency power source 17 to two rows of the drums 12a, 12b at the center; at the same time, the formed gas is ejected from the ejection holes 13 of the pipes 14. Then glow discharge is generated between the drums 12a, 12b and the drums 12c, 12d at the two end rows to decompose the formed gas, whereby amorphous Si photoconductive layers are formed on the drums 12 and the drums 12 themselves are the finished products. |
