| 摘要 |
PURPOSE:To measure a standing wave ratio and wavelength by irradiating a surface acoustic wave element sample which is moved at a necessary speed with laser light, and detecting the intensity of 0-order diffracted light and the maximum and minimum values and period of the interference intensity of +1-order and -1-order diffracted light beams. CONSTITUTION:The surface acoustic wave element sample 2 is placed on a sample table 11 which is moved at the necessary speed (v), and an RF modulator oscillator 4 is connected to the sample 2. The sample 2 is irradiated with the laser light (a) at a necessary angle of incidence. The 0-order diffracted light (b) from the surface part of the sample 2 is detected by a photodetector 8a through a mirror 16a. The +1-order diffracted light (c) and --order diffracted light (d) is passed through a space filter 17 and then enters the interference optical system consisting of a mirror 16b, half-mirror 16c, and optical attenuator 18. Interference light (e) is guided to a photodetector 8c and the photodetecting means consisting of an amplifier 9, lock-in amplifier 12, and modulating signal source 13 detect the maximum and minimum values and the period of the intensity of the interference light. |
