Oxygen recycle type ozonizing apparatus

摘要

An ozonized oxygen fed from an ozonizer is passed to a reaction tower to treat an object material. In recovering non-reacted oxygen from the reaction tower to reuse in the ozonizer, zeolite is used as an adsorbent to remove impurities contained in the recovered oxygen, such as water, volatile organic materials and CO2 gas so that a raw material oxygen without containing any impurity is fed to the ozonizer to increase the ozonizing efficiency.