| 摘要 |
PURPOSE:To form a microscopic pattern with high accuracy and efficiency, by using a polymer or copolymer having specified repeating units. CONSTITUTION:The present resin compsn. contains a compd. generating free radicals due to light or ionizing radiation, and a polymer or copolymer having repeating units each represented by general formula I in which R<1>-R<6> are each H, alkyl, alkoxy, halogen, haloalkyl, or haloalkoxy, and at least one of R<2>-R<6> is alkyl, alkoxy, haloalkyl, or haloalkoxy. A preferable amt. of said units to be used is >=20%, especially, >=50% of the total repeating structural units. |
