| 摘要 |
PURPOSE:To obtain a compact ion mass separator for an ion injection device with excellent chromatic aberration by controlling the strength of an axisymmetric magnetic lens, converging only the desired ion beam on the electrode of a pinhole, and selectively passing through it. CONSTITUTION:A mixed ion beam 10 consisting of a number of elements is emitted from the emitter chip 2 of a field emission type ion beam generation section 1 and is guided into an ion mass separator 4 through a diaphragm 3. A separated ion is converged by an ion beam convergence system 7 and a selective ion beam 11 is guided into the specified position of a semiconductor crystal substrate 9 by an ion beam deflection system 8. The separator 4 consists of an annular axisymmetric magnetic lens 5 and a pinhole electrode 6. The mixed ion beam between the diaphragm 3 and the electrode 6 is sequentially converged with an ion with small mass by a magnetic field and an ion with large mass is converged at a farer position than a field lens. As a result, a separation with excellent chromatic aberration can be performed by controlling the field strength of the lens 5, concentrating only the desired ion, and passing it through the electrode 6. |
