| 摘要 |
PURPOSE:To obtain a long-sized and vertically-magnetized Co-Cr film with superior characteristics, by reversing the direction of a horizontal component in the projected direction of electron beam to a Co-Cr alloy material or a Co material from the direction of a horizontal component in the moving direction of a substrate. CONSTITUTION:In the figure, numbers 19, 20 are melting pots in which a Cr material 21 and a Co material 22 are put and numbers 23, 24 are electron guns to heat and evaporate the Cr and Co materials 21, 22 respectively. Numbers 25, 26 are electron beams projected from the electron guns 23, 24, respectively. As the result of the investigation to form the vertically-magnetized Co-Cr film by the double evaporating device, the moving direction of the substrate in the direction of an arrow 25 increases the anisotropic constant Ku of vertical magnetization larger than that of the reverse direction. At the evaporation using the double evaporating method, the vertically magnetized Co-Cr film is obtained by reversing the direction of the horizontal component in the projected direction of the electron beam to heat and evaporate the Co material to the Co material against the direction of the horizontal component of the moving direction of the substrate. |
