发明名称 MOLDING DIAPHRAGM FOR CHARGED BEAM EXPOSURE DEVICE
摘要 PURPOSE:To remove a molding-beam shape error resulting from the degree of a right angle and degree of parallelism of a rectangle and an irregular shape error of an edge, and to draw an excellent pattern by forming the molding diaphragm by combining fine wires of excellent edge accuracy so as to cross at right angles. CONSTITUTION:A fine gold wire takes a cylindrical shape, and the surface is formed in a smooth surface of not more than 0.1mum irregularity. A rectanular hole 200 is formed by applying tension to four fine gold wires 201-204 and assembling the fine wires in parallel cross shapes, a setting positioning groove 401 for assembling the fine gold wires of high accuracy is set up previously, tension is applied from both tips of the fine gold wires while using the groove as a guide to stretch the fine wires, and the mutual positional relationship of four fine gold wires is measured by a universal tool microscope. When the fixed degree of a right angle and the fixed degree of parallelism are obtained, both tips of the fine gold wires are fixed to a fine gold wire mount 400 through spot welding or silver paste. There is no roundness of corners because straight lines are crossed at right angles.
申请公布号 JPS5921020(A) 申请公布日期 1984.02.02
申请号 JP19820130616 申请日期 1982.07.27
申请人 NIPPON DENSHIN DENWA KOSHA 发明人 KOMATA FUJIO;TAKAMOTO KIICHI
分类号 H01L21/027;H01J37/09;(IPC1-7):01L21/30 主分类号 H01L21/027
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