RADIATION DETECTOR

摘要

PURPOSE:To elevate the detection accuracy and reliability with a higher productivity by inserting shield plates having scintillators into a plurality of grooves provided at a specified space on a substrate while photodetectors are arranged between the grooves. CONSTITUTION:A special glass substrate 22 on the surface of a substrate 20 which is a sector-shaped flat plate centered on the X ray source is photo etched to form a plurality of grooves 23 radially at a specified space and radiation shield plates 13 having scintillator 11 bonded thereon are inserted thereinto. Radiation 2 entered into the scintillators 11 is excited to be converted to light, taken out of a wire 26 as electrical signal of a photo detector 12 mounted on the substrate 20 and connected to a processing circuit with a contact plug 32. Thus, one detector is made up of a pair of shield plates 13 scintillators 11 and a pair of photo detectors 12. This enables the detectors to be retained at a proper accuracy of geometrical position with respect to the X ray source by etching grooves thereby elevating the reliability and stability of the apparatus.