| 摘要 |
PURPOSE:To treat lots of large materials having complicated shapes simultaneously and efficiently, by introducing plasma through a plurality of shower pipes provided on a wall at positions with an angle of 45-120 deg. from each other with respect to the center of a plasma treating tank, into said tank. CONSTITUTION:Plasma introducing ports 4a, 4b, 4c (numerals 2a, 2b, 2c represent shower pipes and 3 represents a quartz tube) are provided at intervals of 120 deg. on the wall of a circular plasma treating apparatus L. Each of exhaust tubes 10a, 10b, 10c (numeral 6a, 6b, 6c represent valves for controlling the degree of vacuum) is provided at an angle of 180 deg. to each of said ports 4a, 4b, 4c to reduce pressure, and plasma is introduced through the shower pipes 2a, 2b, 2c into the treating apparatus 1 to treat materials 7-1 to 7-7, placed on a support table 8 with plasma. It is preferred that plasma introduction and evacuation on each of the opposing positions are synchronously operated to shift the operation time of each group. |
