| 摘要 |
<p>@ An apparatus for producing improved large area photovoltaic devices by substantially reducing the warpage of relatively large area, relatively thin webs (11) of magnetic substrate material which travel through a plurality of glow discharge deposition chambers (28,30,32). As the substrate (11) moves through the chambers (28,30,32), it assumes a normal, elongated path of travel. Due to elevated deposition temperature, elongated path of travel, gravity, etc., the web (11) has a tendency to warp. Warpage of the web (11) promotes the deposition of non-uniform semiconductor alloy layers. To avoid this, there is established by means (50) at least one magnetic field within each deposition chamber (28,30,32) which field is adapted to urge the substrate (11) into a flat, substantially planar path of travel. The new flat path serves to substantially reduce warpage which permits uniform amorphous semiconductor alloy layers to be deposited.</p> |
