发明名称 |
Deposition of coatings upon substrates utilising a high pressure, non-local thermal equilibrium arc plasma. |
摘要 |
<p>A process for the coating of a substrate characterised in that it comprises:
generating a non-LTE arc plasma at a pressure of greater than 0.1 atmospheres;
introducing a coating material into the arc plasma; and
positioning a substrate proximate to the arc plasma, activated species of the coating material formed by the arc plasma contacting the substrate to form a coating is disclosed.
<??>In certain embodiments of the present process, a semiconductor or a photovoltaic semiconductor may be produced.
<??>The present invention offers advantages over the prior art.</p> |
申请公布号 |
EP0099724(A2) |
申请公布日期 |
1984.02.01 |
申请号 |
EP19830304066 |
申请日期 |
1983.07.13 |
申请人 |
THE STANDARD OIL COMPANY |
发明人 |
VUKANOVIC, VLADIMIR;FAZEKAS, GEORGE BRUNO;BUTLER, SUSANNAH MARIE;MILLER, JOHN ROBERT |
分类号 |
C23C14/24;C23C14/32;H01L21/205;H01L21/285;H01L31/04;(IPC1-7):23C13/00 |
主分类号 |
C23C14/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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