| 摘要 |
PURPOSE:To prevent a work from being finely deformed due to the elastic deformation of an absorption surface and prevent the cutting oil and contained dust in the air from infiltrating between the work and the absorption surface by forming a work absorption body with an elastic body. CONSTITUTION:An intermediate passage 5 is radially bored in the radius direction of a chuck proper 3 and is communicated to an air passage 6. Multiple passage holes 8 communicating to the intermediate passage 5 are provided at a right angle to a board surface 7. A work absorption body 9 made of an elastic body such as urethane rubber is stuck to the board surface 7 of the chuck proper 3. Annular grooves 10 are formed on the absorption surface 12 of a work W at the surface of the absorption body 9, and communicating holes 11 communicating to the holes 8 are bored. The work W is closely stuck by vacuum absorption to the absorption surface 12 of the work absorption body 9 made of an elastic body by means of the vacuum pressure of the annular grooves 10 and is cut and machined with a diamond cutter. |
