| 摘要 |
PURPOSE:To accurately observe the flow in a gaseous phase reaction apparatus, by a method wherein a stock material and a gas used in practical reaction are used under the condition of a practical reaction system to bring the gas to a visual state and the flow thereof is observed visually. CONSTITUTION:A gas mixing apparatus 3 for mixing an introduced gas is provided in front of the reaction part 4 of a gaseous phase reaction apparatus 1 and plural barrier walls 11 vertical with respect to the advance direction of gas are alternately arranged to the both inner walls of said apparatus 3 in the advance direction of the gas. In this apparatus 3, a stock material and the gas are reacted under the condition same as a practical reaction condition to synthesize the same powder as the substance accumulated on a substrate 12 and the flow in the substrate of the reaction part 14 is visually observed by using said powder. As the result, the condition of the reaction system can be accurately reflected and the titled method not contaminating the reaction system at all is obtained. |
