Vacuum-type article holder and methods of supportively retaining articles

摘要

A vacuum-type holder (10) for retaining fragile articles such as semiconductor wafers (16) during a manufacturing operation, such as an electrolytic treatment includes a vacuum-operated support (36) at each of the seats (23) which exerts a supporting force against the underside (32) of the wafer (16) which is opposite to and proportional to a vacuum generated holding force which urges the wafer against the seat. The supporting force, consequently, minimizes bending stresses to which the wafer (16) could otherwise be subjected.