| 摘要 |
<p>A processing unit for heating corrosive liquids, primarily ultra-pure, deionized water and other corrosive reagents common to semiconductor processors. The apparatus uses perfluoroalkoxy (PFA) fluorocarbon resin materials throughout the plumbing system which includes a nested pair of coils (52, 54) which are heated within a heating box (30). The apparatus provides a fluid circuit (76, 32, 78) for heating reagent and sampling it for resistivity changes. An alternative flow path (124, 146, 150) bypasses the heating core (32) and directs ambient temperature fluid to a different outlet (100). An alternative function selection provides for periodic flushing of the entire system.</p> |
