| 摘要 |
PURPOSE:To make it possible to obtain a high degree of traveling accuracy, by using a first slider which is made to step by a pulse motor, and by providing a servo-mechanism for displacing a second slider relative to the first slider so that movement is made with the repetition of the above-mentioned motion. CONSTITUTION:A highly sensitive displacement detector 8 is secured on a slider 4 to which a workpiece or the like to be located is coupled. The displacement detector 8 detects the relative displacement between sliders 3, 4 and therefore delivers a voltage Ea to one of input terminals of a comparator 16. The output voltage Ea is branched through a gate 17 and is held in a hold circuit 18. The read-out output of the hold circuit 18 is delivered, after being added to the voltage (-e) of an adder 19, to the other input terminal of the comparator 16 which therefore delivers the difference E between both voltages applied to both input terminal thereof. Further, the difference is integrated and inputted to a driver 20 for driving a servo-motor 15 in accordance with the input voltage E.
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