| 摘要 |
PURPOSE:To perform a high temperature heating in a stabilized state by a method wherein a beryllium oxide sintered body is used for formation of the heat conductive material which constitutes the heating device. CONSTITUTION:A heating device 10 is constructed in such a manner that a heater 12, which is a heat generating body, is interposed between an upper flat plate 11 and a lower flat plate 13. Tungsten is used in the heater 12, and it is formed almost into a continued U-shape. Also, said flat plates 11 and 13 are formed with a beryllium oxide sintered body. A sintered body having relative density of 99.0% or above is to be used. Beryllium oxide sintered body has a high insulating property, and also it has excellet mechanical strength and heat conductivity. |
