| 摘要 |
PURPOSE:To observe easily only the voltage level of a substrate in a desired specific area in a short time, by selecting and outputting voltage distribution data as specified, and displaying it. CONSTITUTION:A scanning type electron microscope 30 detect voltage distribution data on >=3 areas of the substrate. Then, the value of a specified area among those detected values is selected by a processing circuit 31. A switching circuit 32 sends out either of the selected output of the circuit 31 or the output of the microscope 30 and it is passed through a video processing circuit 33, etc., and displayed on a video display device 34. Thus, the voltage level of the substrate in a desired specific area is observed easily in a short time to check the substrate adequately. |
