| 摘要 |
PURPOSE:To measure the reflection factor of an oscillating body and continuous variation in reflection factor, by setting the center axis of a lens orthogonal to a surface to be measured, and arranging a light source and a photosensor at positions symmetrical to the center axis on a focal surface. CONSTITUTION:The center axis of the lens 3 is set orthogonal to the surface 4 to be measured and the light source 1 and photosensor 3 are arranged at the positions symmetrical about the center axis on the focal surface of the lens. Light emitted from the light source 1 is incident as nearly parallel light to the surface to be measured. Its reflected light is incident as nearly parallel light to the photosensor 2 through the lens 3. A distance 6 is set large and the interval 5 between the light source 1 and photosensor 2 is decreased to reduce variation in the detection output of the quantity of reflected light due to the oscillation of the measured surface with amplitude 7, and consequently while the reflection factor of the oscillator is measured stably, continuous variation in reflection factor in the process of thin film formation, etc., is measured. |
