| 摘要 |
PURPOSE:To improve the yield of working by laser light in the stage of working a work piece by the laser light, by adjusting automatically the effective quantity of incident light to an optimum value for working from the reflectance of the laser light. CONSTITUTION:The laser light 12 from a laser oscillator 11 is reflected by a mirror 13, and is irradiated through a rough adjustment part 14 for transmissivity, a mirror 15, a fine adjustment part 16 for transmissivity, mirrors 17, 18 and a condenser lens 19 to the surface of a work piece 20 by which the work piece is worked. The laser light in this case is beforehand adjusted to <=1/10 of the optimum working level to prevent the influence on the work piece. On the other hand, part of the laser light passes through the mirror 13 and enters a power detector 22 for measuring output, the output signal whereof is fed to a controller 23. At the same time, the light reflected from the work piece passes through a lens 19, the mirrors 18, 17 and enters a powder detector 24 for measuring reflectance, the output signal whereof is fed to the controller 23. The ratio of the quantity of the reflected light is calculated in said controller and the part 14 and the part 16 are automatically adjusted in accordance with said ratio to make the laser light of the optimum working output incident to the work piece 20, whereby the yield of working is improved. |
