| 摘要 |
PURPOSE:To measure and observe the surface of an object easily and accurately by a simple constitution wherein reflected scattered lights from the object are scanned in the two axial directions perpendicular to each other by independent two sets of mirrors and the scanned lights are received through a pinhole. CONSTITUTION:Laser beams from a source 1 are scattered in accordacne with the state of the surface of an object 2. These scattered beams are scanned in the two axial directions perpendicular to each other by a mirror of X system and a mirror of Y system, and the scanned lights are received by a light receiving element 8 through a pinhole 7 and displayed in a display 13. By this simple constitution unnecessitating a monitor TV, an optical fiber or the like, the entire scattered beams are surely measured with excellent S/N, and thus the surface of the object is measured and observed easily and accurately. |
