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发明名称
摘要
申请公布号
JPS593859(B2)
申请公布日期
1984.01.26
申请号
JP19760034826
申请日期
1976.03.30
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
MATSUDA TAKASHI
分类号
H01L27/082;H01L21/22;H01L21/331;H01L21/8226;H01L29/08;H01L29/73;H03K19/08
主分类号
H01L27/082
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