| 摘要 |
PURPOSE:To form with high accuracy an electrode having high mechanical strength and large adhesive strength to a basement, by making use of the graphite phase obtained when a groove is formed with laser processing of diamond to form a carbide of electrode material and then to obtain an electrode layer. CONSTITUTION:The tip part of a diamond basement 1 is formed into a pyramid shape. This basement 1 is divided at its ridgeline 2 to form run-in side surfaces 3 and 4 together with a run-out side surface 5 and a scanning surface 6. A groove 8 is formed on the surface 5 by irradiating thin beams of Nd:YAG laser in the lengthwide direction in an inactive gas. Then a graphite phase 11 is formed at the groove 8, and an electrode film 12 is formed on the surface 5 by vapor depositing Ti or Hf. Then a heat treatment is carried out under vacuum for 6-24hr and at 400-900 deg.C to obtain an electrode film 14 of titanium carbide. In such a way, the mechanical strength is increased together with increment of adhesive force to the basement 1 and high accuracy for the electrode 12. |
