| 摘要 |
PURPOSE:To remarkably improve the stability of a gas laser device by setting the incident angle of a laser light to a beam splitter which forms the laser device to an angle smaller than the specific angle, thereby reducing the noise content rate of a laser light. CONSTITUTION:When a beam splitter 3 is inserted into the laser output optical path 2 from a laser oscillator 1, the incident angle of the laser light to the splitter 3 is set to an angle smaller than 45 deg.. Then, a photodetector 5 is arranged at the position for receiving the surface reflected light 4 of the splitter 3, the output is connected to the negative input terminal of an operational amplifier 6, and the positive input terminal of the amplifier 6 is connected to a reference power source 8. Further, the output side of the amplifier 6 is connected to an exciting power source 7, which is then connected to an oscillator 1. With this structure, the output signal of the detector 5 is inputted to the amplifier 6 to obtain a signal proportional to the difference from the reference voltage signal, thereby controlling the power source 7 of the oscillator 1 to regulate the light output. |
