| 摘要 |
PURPOSE:To obtain the solar cell having a high open voltage, high efficiency, and moreover at low cost by a method wherein a condensation high-temperature- resistant polymer endowed with conductivity by thermal decomposition is utilized. CONSTITUTION:The thermally decomposed polymer has high conductivity and thermal-chemical stability. Aromatic polyamide, polyamide imide, polybenzimide, polyoxadiazole or polybenzthiazole, etc., are used, for example. A flexible film is used as the substrate, and a thin film of silicon or gallium arsenide is physically evaporated thereon to form the solar cell. Amorphous silicon is arranged as a target 11, the thermally decomposed polymer having conductivity is arranged as the substrate 15, a heater 13 is heated to make electric discharge of hydrogen gas to be generated, and when a DC voltage of 1kV or more is applied to the heater 13 and the target 11, the target 11 is sputtered according to the hydrogen ion beam, and a silicon film is deposited on the substrate 15 to form junction of silicon and the thermally decomposed polymer. Electromotive force is generated when sunlight is made to irradiate, and the device acts as the solar cell. The same result is obtained also when gallium arsenide is used in place of silicon. |
