| 摘要 |
PURPOSE:To detect a point of time, and to detect not only a temperature at the point of time but also the state of a change at the point of time by juxtaposing a plurality of temperature sensors consisting of resistor layers separately disposed on insulating films with film thickness different from a semiconductor integrated circuit at the lowest on one semiconductor chip in a smart-sensor for detecting a fire. CONSTITUTION:At a point of time in a process of a temperature rise of a wall surface, the temperature of a polycrystalline Si resistor layer 13a formed on a thin oxide film 12a is made higher than that of a polycrystalline Si resistor layer 13b formed on a thick oxide film 12b. At a point of time when the temperature of the wall surface is kept constant, the temperatures of the resistor layers 13a, 13b equalize. At a point of time when the temperature of the wall surface is brought to the state of a drop, on the other hand, the temperature of the resistor layer 13b is made higher than said layer 13a. Accordingly, the process of the temperature rise of the wall surface, a process of the extension of the fire, or a fixed temperature of the wall surface and the fire under a saturated state or a process of a temperature drop of the wall surface, a process of the reduction of the fire is detected at the point of time by detecting and comparing the temperatures of the resistor layers 13a, 13b at the point of time by the resistance values. The informationis processed by an information processing circuit disposed on the same chip, and an adequate output information is emitted to a fire fighting mechanism. |
