发明名称 MASK PLATE POSITIONING APPARATUS
摘要 PURPOSE:To permit a mask plate to be automatically, efficiently and accurately positioned through a single operation of buttons without employing any positioning pin, by arranging such that the mask plate can be automatically positioned by a plurality of stretchable means which are stretchable toward the mask plate on a stage. CONSTITUTION:Driving motors 14a, 14b, 14c cause stretchable arms 16a, 16b, 16c to expand toward and contract away from side surfaces of a mask plate 12, respectively, so as to effect the positioning of the mask plate 12. Plate size selection buttons 20a, 20b, 20c are connected to the motors 14a, 14b, 14c, respectively. Selectively depressing the selection buttons 20a, 20b, 20c according to the size of the mask plate 12 to be positioned causes the motors 14a, 14b, 14c to expand or contract the respective stretchable arms 16a, 16b, 16c by given distances suitable for the positioning of the mask plate 12 with the size thus selected, thereby allowing the mask plate 12 to be positioned by means of positioning members 18a, 18b, 18c through a single operation of the buttons.
申请公布号 JPS5911625(A) 申请公布日期 1984.01.21
申请号 JP19820119781 申请日期 1982.07.12
申请人 HITACHI SEISAKUSHO KK 发明人 YAMAGUCHI SHIYUUJI
分类号 H01L21/30;G03F1/00;G03F1/54;G03F7/20;H01L21/027 主分类号 H01L21/30
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