| 摘要 |
PURPOSE:To provide a titled device which enables the transfer of members to be treated to a treatment section while preventing the damage of the members owing to impact, by the constitution wherein the successively fed members to be treated are held in tight contact at an equal speed with the members under treatment and are transferred with transfer devices of variable speeds. CONSTITUTION:A unit tray body 10 which is a base material to be treated is moved from a supply device 27 upward into a charging chamber 1 of a sputtering device. The body 10 is detected with a photoelectric type sensor consisting of a light emitting element 25 and a photodetector 26, and a pulse motor M1 is driven to feed the same into a sputtering chamber 2 in a treatment section with the carrier 9 of the 1st transfer device 3. Said body 10 therein is transferred by means of carriers 23, 24 of the 2nd transfer device 12 which are moved back and forth alternately. Pulse motors M2, M3 (not shown in the figure) which drive the device 12 are controlled according to the moving distance or time of the carriers 23, 24, and the speed of the succeeding body 10' is decelerated linearly with respect to the body 10'' under movement before the both bodies contact with each other and when an equal speed is attained, both are held in tight contact with each other and are transferred. |
