| 摘要 |
PURPOSE:To prevent the lowering of solar battery efficiency by a method wherein amorphous silicon existing between the adjoining transparent electrodes located on a glass substrate are removed, thereby enabling to prevent the existence of a leakage current between the adjoining solar batteries. CONSTITUTION:Between adjoining transparent electrodes 14, a groove having the same width as the interval of the adjoining transparent electrodes 14 or the width narrower than the interval of adjoining after electrodes 16 is formed on an a-Si layer 15 by performing an etching in such a manner that there exists no a-Si at least in-between the adjoining transparent electrodes 14. According to this construction, no leakage current exists between the adjoining solar batteries, and a transparent electrodes which are larger than the after electrodes can be obtained, thereby enabling to improve the conversion efficiency of the solar battery. |
